Angular velocity sensor having support substrates

ABSTRACT

An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor ( 1 ), that is, an inertial force sensor includes ceramic substrate ( 6 ), lower lid ( 4 ) adhering to ceramic substrate ( 6 ) with adhesives ( 11   a  and  11   b ) (first adhesives), and sensor element ( 2 ) adhering to lower lid ( 4 ) with adhesives ( 10   a  and  10   b ) (second adhesives). The elastic moduli of adhesives ( 11   a  and  11   b ) are smaller than those of adhesives ( 10   a  and  10   b ).

This application is a continuation of U.S. patent application Ser. No.14/347,867 filed Mar. 27, 2014, which is incorporated herein byreference in its entirety.

TECHNICAL FIELD

The present invention relates to an inertial force sensor for detectingan acceleration velocity and an angular velocity, which is used inportable terminals, vehicles, and the like.

BACKGROUND ART

Recently, inertial force sensors such as small angular velocity sensorsand acceleration velocity sensors, which are to be mounted on portableterminals such as digital cameras, portable telephones, and portablegame machines, or on vehicles, have been popularized. A generalconfiguration of an inertial force sensor includes a sensor element fordetecting inertial force and a substrate provided with wiring or thelike, which are incorporated into one package. The sensor elementincludes a weight part attached to a support part via a beam part, anddetects magnitude of inertial force by measuring a displacement amountof the weight part by a piezo element provided to the beam part. Aconfiguration in which this sensor element is allowed to adhere to asubstrate directly or with a lower lid interposed therebetween by usingwith an elastic adhesive (see, for example, Patent Literatures 1 and 2).

CITATION LIST Patent Literature

-   PTL 1: Japanese Patent Unexamined Publication No. 2007-35965-   PTL 2: Japanese Patent Unexamined Publication No. 2009-99822

SUMMARY OF THE INVENTION

However, when an mechanical or a thermal external stress is applied toan inertial force sensor or a user substrate on which an inertial forcesensor is mounted, an external stress is transferred to a beam part of asensor element via the substrate, and thus detection sensitivity of theinertial force sensor fluctuates.

The present invention dissolves the above-mentioned problem, and has anobject to provide an inertial force sensor capable of suppressingfluctuation of detection sensitivity even when an external stress isapplied to the inertial force sensor.

Means to Solve Problems

In order to achieve the above-mentioned object, an inertial force sensorof the present invention includes a substrate having a center portionthat is lower than a peripheral portion; a circuit chip having a firstsurface connected to the peripheral portion of the substrate by firstflip-chip bonding; and a sensor element connected to the first surfaceof the circuit chip by second flip-chip bonding in an inner side thanthe peripheral portion of the substrate. Elastic moduli of firstconnection members used for the first flip-chip bonding are smaller thanelastic moduli of second connection members used for the secondflip-chip bonding.

Furthermore, an inertial force sensor of the present invention includesa substrate, a lower lid adhering to the substrate with first adhesives;and a sensor element adhering to the lower lid with second adhesives.Elastic moduli of the first adhesives are smaller than elastic moduli ofthe second adhesives.

With such a configuration, even when an external stress is applied tothe inertial force sensor, it is possible to suppress transferring of astress to the sensor element. Thus, fluctuation of detection sensitivitycan be suppressed effectively.

Furthermore, an inertial force sensor of the present invention includesa substrate; a circuit chip mounted on the substrate; a lower lidadhering to the circuit chip with first adhesives; and a sensor elementadhering to the lower lid with second adhesives. Elastic moduli of thefirst adhesives are smaller than elastic moduli of the second adhesives.

With such a configuration, even when an external stress is applied tothe inertial force sensor, it is possible to suppress transferring of astress to the sensor element. Thus, fluctuation of the detectionsensitivity can be suppressed effectively.

Furthermore, in an inertial force sensor of the present invention, thesensor element includes a quadrangular frame part having a hollow regionin an inner side thereof; and a flexible part connected to the framepart in the hollow region. It is preferable that fixing parts areprovided on the two facing sides of the frame part, an electrode pad tobe connected to the substrate with a bonding wire is disposed on each ofthe fixing parts, and the first and second adhesives are disposed inpositions corresponding to the fixing parts of the sensor element.

With such a configuration, since the fixing parts provided with theelectrode pad is supported by the substrate via the lower lid, when anelectrode pad of the sensor element and an electrode pad of thesubstrate are connected to each other by bonding with a bonding wire,the sensor element can be prevented from being tilted.

Furthermore, in an inertial force sensor of the present invention, theflexible part includes four weights and beam parts for connecting thefour weights to the frame part, and the lower lid is provided withthrough-holes in positions corresponding to the weights. It ispreferable that a third adhesive is further disposed on an upper surfaceand a lower surface of a substantially center portion of the lower lid,and an elastic modulus of the third adhesive is larger than elasticmoduli of the first adhesives.

With such a configuration, since the sensor element is stronglysupported by the substrate via the lower lid at substantially the centerportion, when the electrode pad of the sensor element and the electrodepad of the substrate are connected by bonding with a bonding wire, thesensor element can be prevented from being tilted.

Furthermore, in the inertial force sensor of the present invention, theframe part includes an outer frame part having the fixing parts and anouter beam part connected to the fixing parts, and a quadrangular innerbeam part connected to the outer beam part at two connection parts andsurrounded by two slits, the flexible part links facing sides of theinner beam part, and includes a center beam part parallel to the outerbeam part, four arms connected to the center beam part, and the fourweights each connected to a tip end of each of the four arms.

With such a configuration, since fluctuation of a frequency differencebetween drive vibration resonance frequency and detection vibrationresonance frequency of a flat vibrator including four arms and fourweights can be reduced, so that the fluctuation of the detectionsensitivity can be sufficiently suppressed.

Furthermore, in the inertial force sensor of the present invention, thefirst adhesives are silicon resin adhesives, and the second and thirdadhesives are epoxy resin adhesives.

Effect of the Invention

According to the present invention, it is possible to provide aninertial force sensor that can suppress fluctuation of detectionsensitivity even when an external stress is applied to the inertialforce sensor.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an external perspective view of an angular velocity sensor inaccordance with an exemplary embodiment of the present invention.

FIG. 2 is a schematic sectional view taken on line 2-2 of FIG. 1.

FIG. 3 is an exploded perspective view of the angular velocity sensor inaccordance with the exemplary embodiment of the present invention.

FIG. 4 is a top view showing an example of the angular velocity sensorin accordance with the exemplary embodiment of the present invention.

FIG. 5 is a schematic sectional view taken on line 5-5 of FIG. 4.

FIG. 6 is a graph showing a relation of a frequency difference between adrive vibration resonance frequency and a detection vibration resonancefrequency of a flat vibrator with respect to a gain of the sensorelement in the angular velocity sensor in accordance with the exemplaryembodiment of the present invention.

FIG. 7 is a top view of the lower lid of the angular velocity sensor inaccordance with the exemplary embodiment of the present invention.

FIG. 8A is a view for illustrating disposition of the adhesives on thelower lid of the angular velocity sensor in accordance with theexemplary embodiment of the present invention.

FIG. 8B is a view for illustrating disposition of the adhesives on thelower lid of the angular velocity sensor in accordance with theexemplary embodiment of the present invention.

FIG. 8C is a view for illustrating disposition of the adhesives on thelower lid of the angular velocity sensor in accordance with theexemplary embodiment of the present invention.

FIG. 8D is a view for illustrating disposition of the adhesives on thelower lid of the angular velocity sensor in accordance with theexemplary embodiment of the present invention.

FIG. 9 is a graph showing simulation results of the relation between theadhesive of the lower lid of the angular velocity sensor and an elementpart stress in accordance with the exemplary embodiment of the presentinvention.

FIG. 10 is a view for illustrating a method for applying a substratedeforming stress to the angular velocity sensor in accordance with theexemplary embodiment of the present invention.

FIG. 11 is a schematic sectional view of another example of the angularvelocity sensor in accordance with the exemplary embodiment of thepresent invention.

FIG. 12 is a schematic sectional view showing still another example ofthe angular velocity sensor in accordance with the exemplary embodimentof the present invention.

FIG. 13 is a sectional view of an angular velocity sensor in accordancewith another exemplary embodiment of the present invention.

FIG. 14 is a plan view of a sensor element in accordance with the otherexemplary embodiment of the present invention.

FIG. 15 is a plan view of a circuit formation plane of ASIC inaccordance with the other exemplary embodiment of the present invention.

FIG. 16A is a top view of a ceramic substrate in accordance with theother exemplary embodiment of the present invention.

FIG. 16B is a bottom view of the ceramic substrate in accordance withthe other exemplary embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

Hereinafter, an inertial force sensor of this exemplary embodiment ofthe present invention is described with an angular velocity sensor takenas an example with reference to drawings.

Exemplary Embodiment

FIG. 1 is an external perspective view of an angular velocity sensor inaccordance with an exemplary embodiment of the present invention. FIG. 2is a sectional view taken on line 2-2 of FIG. 1. FIG. 3 is an explodedperspective view of the angular velocity sensor. As shown in FIGS. 1 to3, angular velocity sensor 1 includes sensor element 2, ASIC 3, lowerlid 4 disposed between sensor element 2 and ASIC 3, cap 5 disposed on anupper surface of sensor element 2, and ceramic substrate 6 on which ASIC3 is to be mounted. Sensor element 2 adheres to an upper surface oflower lid 4 with adhesives 10 a and 10 b (second adhesives). Lower lid 4adheres to an upper surface of ASIC 3 with adhesives 11 a and 11 b(first adhesives). An electrode pad (not shown) is formed on the lowersurface of ASIC 3, and bump-connected to an electrode pad (not shown)corresponding to ceramic substrate 6. Electrode pad 7 is disposed to theouter peripheral part of sensor element 2, and electrode pad 8 isdisposed to the position corresponding to electrode pad 7 on outerperipheral part of ceramic substrate 6. Electrode pad 7 and electrodepad 8 are electrically connected to each other with bonding wire 9.Ceramic substrate 6 has a laminated structure including a plurality ofwiring layers, and sensor element 2 and ASIC 3 are electricallyconnected to each other via the wiring layers. Furthermore, an angularvelocity detection signal is output from a terminal (not shown) providedon the lower surface of ceramic substrate 6 to an external circuit.

Sensor element 2 has a configuration in which a substantiallyquadrangular frame part having a hollow region, a beam part connected tothe frame part, and a flat vibrator connected to the hollow region viathe beam part are formed on the same plane. A drive electrode includinga piezoelectric element and a detection electrode are formed on the flatvibrator, and drives the flat vibrator with a predetermined drivevibration frequency. When a predetermined angular velocity is applied inthis state, a Coriolis force acts on the flat vibrator, detectionvibration having substantially the same frequency as the drive vibrationfrequency is generated in a direction perpendicular to the drivevibration direction. By detecting a displacement amount in the detectionvibration direction of the flat vibrator by the detection electrode, theapplied angular velocity is detected. Note here that a small sensorelement can be formed by fine processing technology using silicon. Adetailed configuration of sensor element 2 is described later.

ASIC 3 is a circuit chip forming a circuit for generating an angularvelocity detection signal by using a semiconductor process on a siliconbase material. That is to say, ASIC 3 receives a detection signal fromsensor element 2 via ceramic substrate 6, carries out necessary signalprocesses such as a synchronous detection process, a filter process, anda correction process, and then outputs an angular velocity detectionsignal to the outside via ceramic substrate 6.

Lower lid 4 is inserted between sensor element 2 and ASIC 3, andsupports sensor element 2 in the frame part of sensor element 2. Lowerlid 4 has a function of protecting sensor element 2 from vibration andshock applied to angular velocity sensor 1, and preventing a mechanicalstress or a thermal stress applied from the outside from beingtransferred to sensor element 2. Detailed configuration of lower lid 4is described later.

Cap 5 is attached to the upper surface of the outer periphery of ceramicsubstrate 6, and seals angular velocity sensor 1 and has a function ofprotecting sensor element 2 from external environment.

Ceramic substrate 6 has a laminated structure including a plurality ofwiring layers, and signals are exchanged between sensor element 2 andASIC 3 via the wiring layers. Furthermore, it functions as a relaysubstrate with respect to an external circuit (not shown) of angularvelocity sensor 1. Furthermore, by fixing ceramic substrate 6 to anapparatus with solder, angular velocity sensor 1 is mounted to theapparatus.

Next, sensor element 2 is described in detail. FIG. 4 is a top view of asensor element to be used in the angular velocity sensor in thisexemplary embodiment.

Sensor element 2 includes an outer frame part including fixing parts 17a and 17 b and outer beam parts 18 a and 18 b connected to fixing parts17 a and 17 b. Furthermore, sensor element 2 includes a sensing partsurrounded via first slits 80 a and 80 b and connection parts 19 a and19 b for connecting the outer frame part and the sensing part on theouter frame part. First slits 80 a and 80 b are formed so as to surroundthe sensing part excluding connection parts 19 a and 19 b.

The sensing part includes inner beam part 20 a, center beam part 20 b,first arm 21, second arm 22, third arm 23, fourth arm 24 (hereinafter,referred to as arms 21 to 24), drive parts 29 to 36, and detector parts41 to 48. The sensing part further includes weights 25 to 28 provided onend portions of first arm 21, second arm 22, third arm 23, and fourtharm 24, respectively. Arms 21 to 24 and weights 25 to 28 form the flatvibrator.

Inner beam part 20 a has a quadrangular shape seen in a top viewthereof. Center beam part 20 b links the corresponding sides of innerbeam part 20 a and is formed in parallel to outer beam parts 18 a and 18b. Arms 21 to 24 are disposed inside inner beam part 20 a, and connectedto center beam part 20 b.

That is to say, fixing parts 17 a and 17 b, outer beam parts 18 a and 18b, and inner beam part 20 a form a frame part having a frame part havinginner edge 14 by forming hollow region 12 at the inner side. Theabove-mentioned lower lid 4 is bonded to bonding parts 50 on the lowersurface of fixing parts 17 a and 17 b. Bonding parts 50 are formed in aprolonged manner along fixing parts 17 a and 17 b from outer beam part18 a to outer beam part 18 b. Center beam part 20 b, arms 21 to 24, andweights 25 to 28 are provided in hollow region 12 of the frame part, andform a flexible part connected to inner edge 14. First slits 80 a and 80b surrounding inner beam part 20 a are through-holes provided betweenbonding part 50 and the flexible part. Electrode pads (not shown) areformed on the upper surfaces of fixing parts 17 a and 17 b,respectively. In this way, it is preferable that bonding parts 50 areprovided on the lower surfaces of the portions on which the electrodepads of sensor element 2 are formed. Thus, when the electrode pads ofsensor element 2 and the electrode pads of ceramic substrate 6 areconnected by bonding, sensor element 2 can be prevented from beingtilted.

Arm 21 has substantially a J-shape extending out in a Y-axis positivedirection from one end connected to center beam part 20 b, extending inan X-axis positive direction from a first joint, and extending in aY-axis negative direction from a second joint. Furthermore, weight 25 isformed on the other end.

Arm 22 has substantially a J-shape extending out in the Y-axis positivedirection from one end connected to center beam part 20 b, extending inan X-axis negative direction from a first joint, and extending in theY-axis negative direction from a second joint. Furthermore, weight 26 isformed on the other end. Arm 22 is formed at the same side as arm 21with respect to center beam part 20 b and in line-symmetric with respectto arm 21.

Arm 23 has substantially a J-shape extending out in the Y-axis negativedirection from one end connected to center beam part 20 b, extending inthe X-axis positive direction from a first joint, and extending in theY-axis positive direction from a second joint. Furthermore, weight 27 isformed on the other end. Arm 23 is formed at the opposite side to arm 21with respect to center beam part 20 b and in line-symmetric with respectto arm 21.

Arm 24 has substantially a J-shape extending out in the Y-axis negativedirection from one end connected to center beam part 20 b, extending inthe X-axis negative direction from a first joint, and extending in theY-axis positive direction from a second joint. Furthermore, weight 28 isformed on the other end. Arm 24 is formed at the opposite side to arm 23with respect to center beam part 20 b and in line-symmetric with respectto arm 23.

Arms 21 to 24 are connected to weights 25 to 28 on one side ofsubstantially quadrangular weights 25 to 28. Arms 21 to 24 can bend inthe X-axis direction, the Y-axis direction and the Z-axis direction.

Drive parts 29 and 30 are provided between center beam part 20 b andfirst joint on arm 21. Detector parts 41 and 42 are provided between thefirst joint and the second joint on arm 21. Drive parts 31 and 32 anddetector parts 43 and 44 are formed on arm 22. Drive parts 33 and 34 anddetector parts 45 and 46 are formed on arm 23. Drive parts 35 and 36 anddetector parts 47 and 48 are formed on arm 24.

Furthermore, center beam part 20 b is provided with monitor parts 37 to40.

FIG. 5 is a sectional view showing a schematic configuration of driveparts 29 and 30, and shows a cross section along line 5-5 in FIG. 4.Drive part 29 is formed by sandwiching piezo element 29 b between lowerelectrode 29 a and upper electrode 29 c, and drive part 30 is formed bysandwiching piezo element 30 b between lower electrode 30 a and upperelectrode 30 c. Drive parts 29 and 30 are formed in parallel to eachother on the upper surface of arm 21.

Both lower electrodes 29 a and 30 a are in a reference electricpotential, and arm 21 can be vibrated in D1 direction of FIG. 4 byapplying alternating driving voltages in the opposite phases to upperelectrodes 29 c and 30 c. Drive parts 31 to 36 are also provided on theupper surface of arms 22 to 24 by the same structure as those of driveparts 29 and 30, respectively.

Detector parts 41 to 48 detect displacement in D2 direction of arms 21to 24 or displacement in the Z-axis direction. Detector parts 41 to 48are formed in a piezoelectric method using a piezo element similar todrive parts 29 and 30 shown in FIG. 5.

As mentioned above, since detector parts 41 to 48 are provided insymmetric to axis C parallel to Y-axis and axis D parallel to X-axis,components of the angular velocity and acceleration velocity around theother axes, which are drive signals as unnecessary signals, can beoffset each other.

Next, principle of sensor element 2 is described. An AC voltage having adrive vibration resonance frequency is applied from an external drivecircuit (not shown) to drive parts 29 and 30, a flat vibrator composedof arm 21 and weight 25 is driven and vibrated along drive vibrationdirection D1 in an XY plane. At this time, when an angular velocity isapplied around a Z axis, a Coriolis force occurs in a directionperpendicular to drive vibration direction D1. The detection vibrationthat synchronizes the drive vibration is excited in detection vibrationdirection D2 by the Coriolis force. Distortion of arm 21 generated bythe detection vibration is detected by detector parts 41 and 42 asdisplacement of arm 21, so that the angular velocity can be detected.

Note here that in general, the detection vibration resonance frequencyin detection vibration direction D2 is set to the vicinity of the drivevibration resonance frequency in detection vibration direction D1. Thisis because the detection vibration generated when the angular velocityis applied synchronizes the drive vibration, so that the detectionvibration tends to be largely excited when the detection vibrationresonance frequency is nearer to the drive vibration resonancefrequency.

Note here that one of the parameters for determining the resonancefrequency of the flat vibrator composed of arms 21 to 24 and weights 25to 28 includes spring constants of outer beam parts 18 a and 18 b, innerbeam part 20 a and center beam part 20 b supporting the flat vibrator.When angular velocity sensor 1 is manufactured, or it is incorporatedinto the apparatus, when a substrate deforming stress is applied toceramic substrate 6, ceramic substrate 6 is distorted. The distortion(stress) is propagated to fixing parts 17 a and 17 b, outer beam parts18 a and 18 b, inner beam part 20 a, and center beam part 20 b of sensorelement 2, and the spring constants of the beam parts are changed, andthe resonance frequency of the flat vibrator fluctuates. When theresonance frequency of the flat vibrator fluctuates, a differencebetween the detection vibration resonance frequency and the drivevibration resonance frequency fluctuates, the detection sensitivity ofsensor element 2 fluctuates.

FIG. 6 shows relation of frequency difference Δf between the drivevibration resonance frequency and the detection vibration resonancefrequency of the flat vibrator with respect to gain (detectionsensitivity) of sensor element 2. As shown in FIG. 6, when frequencydifference Δf fluctuates from 200 Hz to 300 Hz, the gain fluctuates from1.2 to 0.7.

Note here that magnitude of the stress transferred from ceramicsubstrate 6 to sensor element 2 is largely affected by adhesives 10 aand 10 b for allowing sensor element 2 to adhere to lower lid 4 eachother and adhesives 11 a and 11 b for allowing lower lid 4 and ASIC 3 toadhere to each other.

Furthermore, when an ambient temperature of angular velocity sensor 1 ischanged, a thermal stress is applied to sensor element 2 due to adifference in the coefficients of thermal expansion of ceramic substrate6, lower lid 4, and sensor element 2. Outer beam parts 18 a and 18 b,inner beam part 20 a, and center beam part 20 b are also distorted dueto the thermal stress, so that sensitivity of the sensor element ischanged by fluctuation of the resonance frequency of the flat vibrator.Magnitude of the thermal stress transferred to sensor element 2 islargely affected by adhesives 11 a and 11 b.

Next, the relation between an element part stress applied to sensorelement 2 when a substrate deforming stress or a thermal stress isapplied to angular velocity sensor 1, and adhesives 10 a and 10 b and 11a and 11 b is described.

FIG. 7 is a top view of the lower lid used in the angular velocitysensor in this exemplary embodiment. Lower lid 4 supports sensor element2 from the lower side, fixes it onto ASIC 3, and is made of materialsuch as silicon.

Lower lid 4 includes six support parts 4 a, 4 b, 4 c, 4 d, 4 e, and 4 f.Support parts 4 a and 4 b correspond to fixing parts 17 a and 17 b ofsensor element 2. Support parts 4 c and 4 d correspond to outer beamparts 18 a and 18 b of sensor element 2. Support part 4 e corresponds toa portion along the D axis of center beam part 20 b of sensor element 2.Support part 4 f corresponds to a portion along the C axis of sensorelement 2. A part corresponding to weights 25 to 28 of sensor element 2is a through hole, so that vibration in the Z-axis direction of weights25 to 28 is not prevented. Adhesives 10 a and 10 b are coated onsurfaces of support parts 4 a and 4 b which are brought into contactwith sensor element 2. Adhesives 11 a and 11 b are coated on surfaces ofsupport parts 4 a and 4 b which are brought into contact with ASIC 3.

Next, relation between types of adhesives 11 a and 11 b and the elementpart stress transferred to sensor element 2 when the external stress isapplied to angular velocity sensor 1 is described.

FIGS. 8A to D are views showing coated positions and the types ofadhesives 11 on lower lid 4. FIGS. 8A to D are views showing the lowersurface of lower lid 4 (a surface that is brought into contact with ASIC3). FIG. 8A shows a case (case 1) in which adhesives 11 a and 11 b areboth epoxy resin. FIG. 8B shows a case (case 2) in which adhesive 11 ais epoxy resin, and adhesive 11 b is silicon resin (for example,silicone rubber). FIG. 8C shows a case (case 3) in which adhesives 11 aand 11 b are both silicon resin. FIG. 8D shows a case (case 4) in whichadhesive 13 (third adhesive) is further added to the upper and lowersurfaces of an intersection portion between support part 4 e and supportpart 4 f (substantially the center portion of lower lid 4) in additionto FIG. 8C. Note here that adhesives 10 a and 10 b are epoxy resin inboth cases. Herein, an elastic modulus of the epoxy resin is larger thanthat of silicon resin. The elastic modulus of the epoxy resin is about 6GPa, and the elastic modulus of silicon resin is about 6 MPa.

FIG. 9 is a graph showing a change of the element part stress (unit:MPa) corresponding to each of the cases (cases 1 to 4) of FIGS. 8A to D.Herein, the element part stress of the ordinate shows a stresstransferred to sensor element 2 when external stresses such as asubstrate deforming stress and a thermal stress are applied to angularvelocity sensor 1.

A method for measuring an element part stress (characteristic A) withrespect to the substrate deforming stress is shown in FIG. 10. As shownin FIG. 10, base 102 is fixed to bench 100 in a manner in which twopoints at both ends in the end portion A in the X-axis direction of endportion A at one side of the Y-axis direction. Spacer 104 having apredetermined thickness is inserted between bench 100 and base 102 atend portion A. Angular velocity sensor 1 is mounted in substantially thecenter portion of the upper surface of base 102, and the lower surfaceof angular velocity sensor 1 and the upper surface of base 102 adhere toeach other with an adhesive. The other end portion B of base 102 isdepressed in the direction shown by arrow 103 (Z-axis direction,vertical direction). Thus, end portion B of base 102 can be bentdownward by an amount corresponding to the thickness of spacer 104. Inthis state, end portion B is depressed so as to deform base 102 by only0.5 mm. In this state, the element part stress transferred to sensorelement 2 is measured.

On the other hand, an element part stress (characteristic B) withrespect to the thermal stress is a stress which sensor element 2receives when the ambient temperature of angular velocity sensor 1 ismade to be 85° C. with respect to the reference temperature of 25° C.

As shown in characteristic A of FIG. 9, as to the substrate deformingstress, it is demonstrated that element part stresses are changed to 106MPa, 64 MPa, 15 MPa, and 16.4 MPa, respectively, corresponding to case1, case 2, case 3, and case 4. Similarly, as shown in characteristic B,as to the thermal stress, it is demonstrated that the element partstresses are changed to 36.9 MPa, 40.6 MPa, 11.7 MPa, and 18.5 MPa,respectively, corresponding to case 1, case 2, case 3, and case 4. Inthis way, as to the substrate deforming stress, it is demonstrated thatthe element part stress of case 3 is reduced to about 1/7 as comparedwith that of case 1. That is to say, when elastic moduli of adhesives 11a and 11 b to be coated on the surface that is brought into contact withASIC 3 of support parts 4 a and 4 b of lower lid 4 are made to besmaller than that of adhesives 10 a and 10 b to be coated on the surfacethose is brought into contact with sensor element 2 of support parts 4 aand 4 b of lower lid 4, the element part stress can be radially reduced.With respect to the thermal stress, the element part stress of case 3 isthe smallest.

In this way, it is preferable that adhesives 10 a and 10 b that are hard(having large elastic moduli) are used for the upper surface (primaryadhesive bonding surface) of lower lid 4 that is brought into directcontact with sensor element 2, and adhesives 11 a and 11 b that are soft(having small elastic moduli) are used for the lower surface (secondaryadhesive bonding surface) of lower lid 4 that is not brought into directcontact with sensor element 2. Thus, even when the substrate deformingstress or the thermal stress is applied to angular velocity sensor 1, itis possible to efficiently suppress transmittance of such stresses tosensor element 2. Therefore, it is possible to suppress fluctuation of afrequency difference between the drive vibration resonance frequency andthe detection vibration resonance frequency of sensor element 2, andsuppress fluctuation of detection sensitivity of the angular velocity.Note here that as the soft adhesives, instead of silicon resin,gel-state adhesives (30 KPa to 300 KPa), silicone rubber (4 MPa to 40MPa), or the like, may be used. Furthermore, as hard adhesive, insteadof epoxy resin, cyanoacrylate adhesive (0.7 GPa to 1 GPa), glass (65 GPato 90 GPa), or the like, may be used.

By the way, in the case of FIG. 8D (case 4), in addition to supportparts 4 a and 4 b of lower lid 4, adhesive 13 is coated on the uppersurface and lower surface of the center portion on which support part 4e and support part 4 f cross over each other, and the elastic modulus ofadhesive 13 is made to be larger than the elastic moduli of adhesives 11a and 11 b. Thus, lower lid 4 can be strongly supported on the uppersurface of ASIC 3 with adhesive 13 having a large elastic force.Therefore, also when electrode pad 7 of sensor element 2 and electrodepad 8 of ceramic substrate 6 are connected by bonding with bonding wire9, it is possible to prevent sensor element 2 from being tilted.

Next, another angular velocity sensor of this exemplary embodiment isdescribed. FIG. 11 is a schematic sectional view showing a configurationof another angular velocity sensor 1 a of this exemplary embodiment. Asshown in FIG. 11, angular velocity sensor 1 a is different from angularvelocity sensor 1 in that ASIC 3 (not shown) is not incorporated intoangular velocity sensor 1 a, and lower lid 4 is directly mounted on theupper surface of ceramic substrate 6. Then, ASIC 3 is disposed outsideof angular velocity sensor 1 a, and sensor element 2 exchanges signalswith respect to outside ASIC 3 via ceramic substrate 6. In angularvelocity sensor 1 a, lower lid 4 and sensor element 2 adhere to eachother with adhesives 10 a and 10 b, and lower lid 4 and ceramicsubstrate 6 adhere to each other with adhesives 11 a and 11 b. Also inangular velocity sensor 1 a, when the elastic moduli of adhesives 11 aand 11 b are made to be smaller than those of adhesives 10 a and 10 b,it is possible to suppress the transmission of a substrate deformingstress and a thermal stress to sensor element 2. As a result, thefluctuation of the frequency difference between the drive vibrationresonance frequency and the detection vibration resonance frequency ofsensor element 2 can be reduced, and fluctuation of the detectionsensitivity can be efficiently suppressed.

A still another example of the angular velocity sensor in this exemplaryembodiment is described. FIG. 12 is a schematic sectional view showing aconfiguration of the still another angular velocity sensor 1 b of thisexemplary embodiment. As shown in FIG. 12, angular velocity sensor 1 bis different from angular velocity sensor 1 in that ASIC 3 instead ofcap 5 is mounted on the upper surface of ceramic substrate 6, and lowerlid 4 is directly mounted on the upper surface of ceramic substrate 6.An electrode pad (not shown) is formed on the lower surface of the outerperiphery of ASIC 3, and is bump-connected to the electrode pad (notshown) which corresponds to the uppermost layer of ceramic substrate 6.Furthermore, electrode pad 8 is disposed on the upper surface of theinner periphery of wiring layers 62 of ceramic substrate 6, and iselectrically connected to electrode pad 7 of sensor element 2 withbonding wire 9. Also in angular velocity sensor 1 b, lower lid 4 andsensor element 2 adhere to each other with adhesives 10 a and 10 b, andlower lid 4 and ceramic substrate 6 adhere to each other with adhesives11 a and 11 b. Also in angular velocity sensor 1 b, when the elasticmoduli of adhesives 11 a and 11 b can be made to be smaller than theelastic moduli of adhesives 10 a and 10 b, it is possible to suppressthe transmission of a substrate deforming stress and a thermal stress tosensor element 2. As a result, the fluctuation of the frequencydifference between the drive vibration resonance frequency and thedetection vibration resonance frequency of sensor element 2 can bereduced, and fluctuation of the detection sensitivity can be efficientlysuppressed.

As described above, according to the present invention, in the angularvelocity sensor in which a sensor element is mounted on the ASIC or theceramic substrate via a lower lid, when the elastic modulus of adhesivewith which the sensor element and the ASIC or the ceramic substrateadhere to each other is made to be smaller than the elastic modulus ofthe adhesive with which the sensor element and the lower lid adhere toeach other, transmittance of a stress applied to the angular velocitysensor to the sensor element can be efficiently suppressed. As a result,since the fluctuation of the frequency difference between the drivevibration resonance frequency and the detection vibration resonancefrequency of the sensor element can be suppressed, the fluctuation ofthe detection sensitivity of an inertial force sensor such as an angularvelocity sensor can be efficiently suppressed.

In the above-mentioned exemplary embodiment, an angular velocity sensoris described as an example of the inertial force sensor, but the presentinvention can be applied to the other sensor elements, for example, anacceleration velocity sensor, which uses a vibrator.

Furthermore, the above-mentioned exemplary embodiment describes anexample in which silicon resin is used as the first adhesives, and epoxyresin is used as second and third adhesives, but the other combinationof adhesives may be used as long as the relation with respect to theelastic modulus is the same.

Other Exemplary Embodiment

FIG. 13 is a sectional view of angular velocity sensor in accordancewith another exemplary embodiment of the present invention.

As shown in FIG. 13, angular velocity sensor 201 includes sensor element202, ASIC 203, sealing resin 205, and ceramic substrate 206. Sensorelement 202 is connected to a surface of ASIC 203 on which a circuit isformed by flip chip. ASIC 203 is connected to ceramic substrate 206 byflip chip. Sealing resin 205, together with ceramic substrate 206,covers sensor element 202 and ASIC 203. Hereinafter structures,connection positions, and connection states thereof are described indetail.

FIG. 14 is a plan view of sensor element 202. Sensor element 202 hasquadrangular outer frame part 220 a provided with hollow region 212.Sensor element 202 has center beam part 220 b linking facing sides ofouter frame part 220 a in such a manner as crossing over the centerportion of hollow region 212. Sensor element 202 has four weights 225 to228. Four weights 225 to 228 are connected to the vicinity of the centerof center beam part 220 b by first to fourth arms 221 to 224. Outerframe part 220 a, center beam part 220 b, weights 225 to 228, and firstto fourth arms 221 to 224 are formed unitarily with each other by thesame members. Each of first to fourth arms 221 to 224 bends in at leasttwo portions and is connected to each of weights 225 to 228. Thus,weights 225 to 228 tend to move by the inertial force, and thesensitivity is improved.

As shown in FIG. 14, sensor element 202 includes drive parts 229 to 236,detector parts 241 to 248, and monitor parts 237 to 240 in each of firstto fourth arms 221 to 224.

As shown in FIG. 14, sensor element 202 has connection electrodes 251 intwo facing sides of outer frame part 220 a, and connection electrodes251 are connected to drive parts 229 to 236 or detector parts 241 to 248by wiring (not shown). Two sides forming connection electrode 251 areformed into the sides parallel to center beam part 220 b. Thus, twosides on which connection electrode 251 is not formed can be made to bethinner than two sides provided with connection electrode 251, they bendas beams and can absorb shock from the outside.

Sensor element 202 shown in FIG. 14 is sensor element 2 shown in FIG. 4from which fixing parts 17 a and 17 b, outer beam parts 18 a and 18 b,and connection parts 19 a and 19 b are excluded. Drive parts 229 to 236and detector parts 241 to 248 of sensor element 202 have the samefunctions as those of drive parts 29 to 36 and detector parts 41 to 48of sensor element 2.

With this configuration, a sensor element can be further miniaturized,and, in turn, an entire part of the angular velocity sensor can befurther miniaturized. Sensor element 202 has substantially a squareshape.

FIG. 15 is a plan view of a circuit formation plane of ASIC 203. Asshown in FIG. 15, the circuit formation plane of ASIC 203 is providedwith inner electrodes 252 and outer electrodes 253.

As shown in FIG. 15, inner electrodes 252 are formed along facing twosides of ASIC 203. Inner electrodes 252 are connected to connectionelectrodes 251 of sensor element 202.

As shown in FIG. 15, outer electrodes 253 are formed along facing twosides of ASIC 203. Outer electrodes 252 are connected to connectionelectrodes 251 of sensor element 202. Outer electrodes 253 are connectedto ceramic substrate 206. In FIG. 15, outer electrodes 253 are formedalong the two facing sides that are different from the sides providedwith inner electrodes 252. With this configuration, the degree offreedom of disposing of inner electrode 252 and outer electrode 253 isimproved.

Note here that an electrode of ASIC 203 connected to sensor element 202is referred to as inner electrode 252, and ASIC 203 connected to ceramicsubstrate 206 is referred to as outer electrode 253, but it is notnecessary that inner electrode 252 is provided to the center than outerelectrode 253.

Furthermore, ASIC 203 has a rectangular shape in which a longer side islonger by 10-20% than the shorter side.

ASIC 203 is formed by bonding re-wiring layers to a semiconductor chip.That is to say, inner electrodes 252 and outer electrodes 253 are laidout by re-wiring layers from a terminal of the semiconductor chip, andare disposed as shown in FIG. 15. Each re-wiring layer has a laminatedstructure of the insulating layer and the wiring layer with a shieldinglayer, which are widely provided with a conductor, interposedtherebetween, so that an effect of coupling on ASIC 203 from the outsidecan be reduced. The shielding layer is in a ground electric potential orfloating in which it is not connected to the semiconductor chip orsensor element 202.

FIG. 16A is a top view of ceramic substrate 206, and FIG. 16B is abottom view of ceramic substrate 206.

As shown in FIG. 16A, ceramic substrate 206 includes space portion 254for accommodating sensor element 202, and electrode pad 208 formed inthe peripheral portion. The depth of space portion 254 is about 250 to260 μm. As the depth is smaller, the thickness of the inertial forcesensor can be reduced and a stress can be relieved. That is to say, theheight at the center portion is lower than the height at the peripheralportion in ceramic substrate 206, and, thus, space portion 254 isformed. Electrode pad 208 is formed along two facing sides of ceramicsubstrate 206. Electrode pads 208 are connected to outer electrodes 253of ASIC 203, and when outer electrodes 253 are formed on four sides,electrode pads 208 are also formed on the four sides.

As shown in FIG. 16B, ceramic substrate 206 has connection terminals 255to be connected to the outside on the lower surface thereof. Connectionterminals 255 are connected to electrode pads 208 by wiring (not shown)that passes through the inside of ceramic substrate 206.

Next, positional relation and connection of each of sensor element 202,ASIC 203, sealing resin 205, and ceramic substrate 206 in exemplaryembodiment are described with reference to FIG. 13.

Sensor element 202 is connected to a circuit formation plane (firstsurface) side of ASIC 203. More specifically, connection electrode 251of sensor element 202 and inner electrode 252 of ASIC 203 are flip-chipconnected (second flip-chip bonding) by copper post 256 via a gold bump(not shown). The height of the gold bump is about 20 μm, and the heightof copper post 256 is about 24 μm to 40 μm. As a result, distancebetween sensor element 202 and ASIC 203 becomes 44 μm to 60 μm. In orderto obtain advantages with respect to the stress, it is preferable thatsensor element 202 and ASIC 203 are apart from each other by not lessthan 36 μm. In this way, when flip-chip bonding is carried out, speed atwhich signals are exchanged between sensor element 202 and ASIC 203 canbe increased.

Note here that connection between sensor element 202 and ASIC 203 arecarried out via a gold bump, but connection is carried out by mainlycopper post. Therefore, the elastic force is increased. Furthermore,other than this gold bump, conductive paste such as silver paste andsolder can be used.

The thickness of sensor element 202 is 90 μm to 125 μm. It is preferablethat sensor element 202 is apart from the bottom surface of spaceportion 254 of ceramic substrate 206 by 100 μm. When they are disposedcloser, physical interference or electrical interference may occur dueto vibration.

ASIC 203 is connected to ceramic substrate 206 in such a manner that acircuit formation plane side of ASIC 203 faces ceramic substrate 206 inorder that sensor element 202 is accommodated in space portion 254 ofceramic substrate 206. More specifically, outer electrodes 253 of ASIC203 and connection terminals 255 of sensor element 202 are flip-chipconnected (first flip-chip bonding) by gold bump 257. The height of goldbump 257 is about 20 μm. In this way, when flip-chip bonding is carriedout, speed at which signals are exchanged between ASIC 203 and theoutside via ceramic substrate 206 can be increased.

Since connection between ASIC 203 and ceramic substrate 206 is carriedout via only a gold bump, the elastic force becomes smaller than that ofcopper post 256.

Note here that connection between ASIC 203 and ceramic substrate 206 canbe carried out with material having relatively low elasticity, forexample, conductive paste such as silver paste other than a gold bump.Thus, even when a substrate deforming stress or a thermal stress isapplied to angular velocity sensor 201, it is possible to efficientlysuppress transmission of such stresses to sensor element 202. Therefore,the fluctuation of the frequency difference between the drive vibrationresonance frequency and the detection vibration resonance frequency canbe sufficiently suppressed, thus enabling the fluctuation of thedetection sensitivity of the angular velocity to be suppressed.

The thickness of ASIC 203 is 150 μm to 270 μm, the thickness of sealingresin 205 that is positioned higher than ASIC 203 is 80 μm to 130 μm,and the thickness of sealing resin 205 is smaller than that of ASIC 203.The thinner ASIC 203 is, the greater the effectiveness with respect tostress relaxation is. That is to say, as both ASIC 203 and sealing resin205 are thinner, the effectiveness with respect to stress relaxation isincreased.

Sealing resin 205 is formed on ceramic substrate 206 so as to cover ASIC203. At this time, it is preferable that sealing resin 205 has viscositysuch that it enters into space portion 254 of ceramic substrate 206.That is to say, material and pressurizing are selected by consideringspace between ASIC 203 and ceramic substrate 206. Furthermore, asmaterial of the sealing resin, material having lower elasticity thanthat of a gold bump is preferable. Thus, the gold bump is predominant inthe rigidity of connection between ASIC 203 and ceramic substrate 206.

As sealing resin 205, one obtained by laminating a plurality of resinfilms can be used. At this time, it is preferable that a film at an ASIC203 side is resin having higher viscosity than that of a film atopposite side to ASIC 203 such that resin does not easily flow intospace portion 254 of ceramic substrate 206. Furthermore, it ispreferable that the film at the ASIC side is a film having smallerfiller size than that of the film disposed opposite side to ASIC 203.

Ceramic substrate 206 has a wiring structure inside thereof, electrodepad 208 of FIG. 16A to connection terminal 255 of FIG. 16B are connectedto each other by wiring. In FIG. 16B, connection terminals 255 aredisposed at two facing sides of ceramic substrate 206, but connectionterminals 255 may be disposed at four sides, so that space of connectionterminal 255 can be increased.

Furthermore, the thickness of a portion positioned below space portion254 of ceramic substrate 206 is 100 μm to 150 μm. When the thickness islarger, the film can bend such that a stress is relieved.

As mentioned above, a sensor element, ASIC, a ceramic substrate, sealingresin, a cap, and the like, are described, but they can be combined in ascope in which they are not contradictory to each other. For example, inFIG. 13, instead of sealing resin, cap can be used. Furthermore, sensorelement 2 of FIG. 4 can be used instead of sensor element 202 in astructure shown in FIG. 13. Furthermore, on the contrary, sensor element202 shown in FIG. 14 can be used instead of sensor element 2 in astructure shown in FIG. 1. The same is true to ASIC 3 and ASIC 203.

INDUSTRIAL APPLICABILITY

The present invention can be widely applied for inertial force sensorsmounted on portable devices such as portable telephones, digitalcameras, portable game machines, and PDA, and on a vehicle.

REFERENCE MARKS IN THE DRAWINGS

1, 1 a, 1 b, 201 angular velocity sensor

2, 202 sensor element

3, 203 ASIC (circuit chip)

4 lower lid

4 a, 4 b, 4 c, 4 d, 4 e, 4 f support part

5 cap

6, 206 ceramic substrate

7, 8, 208 electrode pad

9 bonding wire

10 a, 10 b second adhesive

11 a, 11 b first adhesives

12, 212 hollow region

13 third adhesive

14 inner edge

17 a, 17 b fixing part

18 a, 18 b outer beam part

19 a, 19 b connection part

20 a inner beam part

20 b, 220 b center beam part

21-24 arm

25-28, 225-228 weight

29-36, 229-236 drive part

29 a, 30 a lower electrode

29 b, 30 b piezo element

29 c, 30 c upper electrode

37-40, 237-240 monitor part

41-48, 241-248 detector part

50 bonding part

62 wiring layer

80 a, 80 b first slit (through-hole)

100 bench

101 screw

102 base

103 arrow

104 spacer

252 inner electrode (second electrode)

253 outer electrode (first electrode)

254 space portion

255 connection terminal

256 copper post (second connection member)

257 gold bump (first connection member)

1-6. (canceled)
 7. Angular velocity sensor having support substratescomprising: a first substrate having an output terminal; a secondsubstrate disposed on the first substrate, having a circuit carrying outat least one of a signal process selected from a synchronous detectionprocess, a filter process or a correction process; a third substratedisposed on the second substrate; a fourth substrate disposed on thethird substrate, having a frame part, a beam part connected to the framepart, a weight part connected to the beam part and an electrode paddisposed on the frame part; a bonding wire electrically connecting theelectrode pad and the second substrate; a first connection layerdisposed between the second substrate and the third substrate; and asecond connection layer disposed between the third substrate and thefourth substrate; wherein the first substrate, the second substrate, thethird substrate and the fourth substrate are stacked in this order, andwherein an elastic modulus of the first connection layer is smaller thanan elastic modulus of the second connection layer.
 8. The angularvelocity sensor having support substrates of claim 7, wherein theelectrode pad is disposed on an upper surface of the frame part of thefourth substrate.
 9. The angular velocity sensor having supportsubstrates of claim 7, wherein the weight part includes a first weightpart, a second weight part, a third weight part and a fourth weightpart, and wherein the third substrate is provided with through-holes atpositions corresponding to the first weight part, the second weightpart, the third weight part and the fourth weight part.
 10. The angularvelocity sensor having support substrates of claim 7, wherein the weightpart includes a first weight part, a second weight part, a third weightpart and a fourth weight part; the beam part includes a first beam part,a second beam part, a third beam part and a fourth beam part connectedto respective one of the first weight part, the second weight part, thethird weight part and the fourth weight part; the fourth substrateincludes a center beam part connected to the first beam part, the secondbeam part, the third beam part and the fourth beam part, and a thirdlayer is disposed between the center beam part and the third substrate.11. The angular velocity sensor having support substrates of claim 10,wherein the connection layer is disposed below a center of the fourthsubstrate.
 12. The angular velocity sensor having support substrates ofclaim 7, wherein the first substrate includes a cavity to accommodatethe second substrate, the third substrate and the fourth substrate. 13.The angular velocity sensor having support substrates of claim 7,wherein the first substrate includes an electrode connected to thebonding wire, and wherein the first substrate comprises a ceramicmaterial.
 14. The angular velocity sensor having support substrates ofclaim 7, wherein each of the second substrate, the third substrate andthe fourth substrate comprise a silicon.
 15. The angular velocity sensorhaving support substrates of claim 7, wherein the fourth substrateincludes a driver part to vibrate each of the weight parts and adetector part to detect a Coriolis force caused by an angular velocityapplied to the angular velocity sensor.
 16. The angular velocity sensorhaving support substrates of claim 15, wherein each of the driver partand the detector part comprises piezoelectric element.
 17. Angularvelocity sensor having support substrates comprising: a first substratehaving an output terminal; a second substrate disposed on the firstsubstrate, having a circuit carrying out at least one of a signalprocess selected from a synchronous detection process, a filter processor a correction process; a third substrate disposed on the secondsubstrate; a fourth substrate disposed on the third substrate, having aframe part, a beam part connected to the frame part, a weight partconnected to the beam part and an electrode pad disposed on the framepart; a bonding wire electrically connecting the electrode pad and thesecond substrate; a first connection layer disposed between the secondsubstrate and the third substrate; and a second connection layerdisposed between the third substrate and the fourth substrate; whereinthe first substrate, the second substrate, the third substrate and thefourth substrate are stacked in this order, wherein the fourth substrateis thicker than the third substrate, and wherein an elastic modulus ofthe first connection layer is smaller than an elastic modulus of thesecond connection layer.
 18. The angular velocity sensor having supportsubstrates of claim 17, wherein the electrode pad is disposed on anupper surface of the frame part of the fourth substrate.
 19. The angularvelocity sensor having support substrates 1 of claim 17, wherein theweight part includes a first weight part, a second weight part, a thirdweight part and a fourth weight part, and wherein the third substrate isprovided with through-holes at positions corresponding to the firstweight part, the second weight part, the third weight part and thefourth weight part.
 20. The angular velocity sensor having supportsubstrates of claim 17, wherein the weight part includes a first weightpart, a second weight part, a third weight part and a fourth weightpart; the beam part includes a first beam part, a second beam part, athird beam part and a fourth beam part connected to respective one ofthe first weight part, the second weight part, the third weight part andthe fourth weight part; the fourth substrate includes a center beam partconnected to the first beam part, the second beam part, the third beampart and the fourth beam part, and a third layer is disposed between thecenter beam part and the third substrate.
 21. The angular velocitysensor having support substrates of claim 20, wherein the connectionlayer is disposed below a center of the fourth substrate.
 22. Theangular velocity sensor having support substrates of claim 17, whereinthe first substrate includes a cavity to accommodate the secondsubstrate, the third substrate and the fourth substrate, wherein thefirst substrate includes an electrode connected to the bonding wire, andwherein the first substrate comprises a ceramic material.
 23. Theangular velocity sensor having support substrates of claim 17, whereinthe fourth substrate includes a driver part to vibrate each of theweight parts and a detector part to detect a Coriolis force caused by anangular velocity applied to the angular velocity sensor, and whereineach of the driver part and the detector part comprises piezoelectricelement.
 24. The angular velocity sensor having support substrates ofclaim 8, wherein the second connection layer is provided at a lowersurface of the forth substrate opposite to the electrode pad.
 25. Theangular velocity sensor having support substrates of claim 7, wherein aspace is provided between the second substrate and the third substrate.26. The angular velocity sensor having support substrates of claim 7,wherein a space is provided between the third substrate and the fourthsubstrate.